The TVA plasma source has a confined plume. Therefore, translation and rotation systems were designed to obtain uniform deposition over large areas.
The facility is capable of coating metal, ceramic or DLC thin films on plane surfaces uniformly.
Size of area that can be coated uniformly: 3 x 360 mm diameter plates, 180 x 500 mm plate, 0.3 x 3 m rolled textile material. The technology can be up-scaled.
Design of custom-made plasma sources and industrial coating machines.